Green silicon carbide for Semiconductor substrate polishing
Green silicon carbide (SiC) is a high-purity abrasive material widely used in semiconductor substrate polishing due to its exceptional hardness (9.2–9.5 Mohs), thermal stability, and chemical inertness. Here’s a detailed breakdown of its role in semiconductor substrate polishing: 1. Key Properties of Green SiC for Polishing High Hardness: Effective for